Diebold, Alain C.

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Handbook of Silicon Semiconductor Metrology

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Frontiers of Characterization and Metrology for Nanoelectronics: 2007 International Conference on Frontiers of Characterization and Metrology: v. 931 ... / Materials Physics and Applications)

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Characterization and Metrology for Ulsi Technology 2005: v.788 (AIP Conference Proceedings)

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Characterization and metrology for ULSI technology: 1998 international conference, Gaithersburg, Maryland, March 1998 (AIP conference proceedings)

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