Wafer Manufacturing: Shaping of Single Crystal Silicon Wafers
Language: English
Published by John Wiley and Sons Ltd, 2021
- Hardcover
- New
Seller: Kennys Bookstore, Olney, MD, U.S.A.Kennys Bookstore
AbeBooks seller since October 9, 2009
Condition: New
£ 161.92
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Add to basketItem description from seller
Presenting all the major stages in wafer manufacturing, from crystals to prime wafers. This book first outlines the physics, associated metrology, process modelling and quality requirements and the goes on to discuss wafer forming and wafer surface preparation techniques. Num Pages: 336 pages. BIC Classification: TJFD5. Category: (P) Professional & Vocational. Dimension: 244 x 170. . . 2021. 1st Edition. Hardcover. . . . . Books ship from the US and Ireland.
Seller Inventory # V9780470061213
- Title
- Wafer Manufacturing: Shaping of Single Crystal Silicon Wafers
- Author
- Imin Kao
- Publisher
- John Wiley and Sons Ltd
- Publication year
- 2021
- Condition
- New
- Binding
- Hardcover
- Language
- English
- ISBN 10
- 0470061219
- ISBN 13
- 9780470061213
Presenting all the major stages in wafer manufacturing, from crystals to prime wafers.
This book first outlines the physics, associated metrology, process modelling and quality requirements and the goes on to discuss wafer forming and wafer surface preparation techniques. The whole is rounded off with a chapter on the research and future challenges in wafer manufacturing.
"Synopsis" may belong to another edition of this title.
About the Author
Imin Kao, is Professor in the Department of Mechanical Engineering at the State University of New York in Stony Brook, USA. He is Faculty Director of the Undergraduate College in Information and Technology Studies. He holds three patents, and his research foci include robotic manipulation with soft contacts and smart contact surface technology using MEMS.
Chunhui Chung, is Associate Professor in the Department of Mechanical Engineering at the National Cheng Kung University in Taiwan.
"About the title" may belong to another edition of this title.
Kennys Bookstore
Olney, MD, U.S.A.
AbeBooks seller since October 9, 2009
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