Updates in Advanced Lithography
Language: English
Published by Intechopen, 2013
- Hardcover
- New
Seller: AHA-BUCH GmbH, Einbeck, GermanyAHA-BUCH GmbH
AbeBooks seller since August 14, 2006
Condition: New
£ 165.40
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Add to basketItem description from seller
nach der Bestellung gedruckt Neuware - Printed after ordering - Advanced lithography grows up to several fields such as nano-lithography, micro electro-mechanical system (MEMS) and nano-phonics, etc. Nano-lithography reaches to 20 nm size in advanced electron device. Consequently, we have to study and develop true single nanometer size lithography. One of the solutions is to study a fusion of top down and bottom up technologies such as EB drawing and self-assembly with block copolymer. In MEMS and nano-photonics, 3 dimensional structures are needed to achieve some functions in the devices for the applications. Their formation are done by several methods such as colloid lithography, stereo-lithography, dry etching, sputtering, deposition, etc. This book covers a wide area regarding nano-lithography, nano structure and 3-dimensional structure, and introduces readers to the methods, methodology and its applications.
Seller Inventory # 9789535111757
- Title
- Updates in Advanced Lithography
- Author
- Sumio Hosaka
- Publisher
- Intechopen
- Publication year
- 2013
- Condition
- Neu
- Binding
- Buch
- Language
- English
- ISBN 10
- 9535111752
- ISBN 13
- 9789535111757
- Item weight
- 782 grams
- Dimensions
- 266x185x23 mm
"Synopsis" may belong to another edition of this title.
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