Ultra Clean Processing of Silicon Surfaces V: Proceedings of the Fifth International Symposium on Ultra Clean Processing of Silicon Surfaces (Ucpss 2002) . September 2002 (Solid State Phenomena)
Language: English
Published by Scitec Publications, Ltd., 2003
- Softcover
- Used
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- Title
- Ultra Clean Processing of Silicon Surfaces V: Proceedings of the Fifth International Symposium on Ultra Clean Processing of Silicon Surfaces (Ucpss 2002) . September 2002 (Solid State Phenomena)
- Author
- Marc Heyns
- Publisher
- Scitec Publications, Ltd.
- Publication year
- 2003
- Condition
- Like New
- Book Type
- book
- Binding
- Paperback
- Language
- English
- ISBN 10
- 3908450780
- ISBN 13
- 9783908450788
The issues addressed by the Sixth International Symposium on the Ultra Clean Processing of Silicon Surfaces included all aspects of ultra-clean Si-technology, cleaning and contamination control in both front-end-of-line (FEOL) and back-end-of-line (BEOL) processing.
Volume is indexed by Thomson Reuters CPCI-S (WoS).
This covered studies of Si-surface chemistry and topography and its relationship to device performance and process yield, cleaning in relationship to new gate stacks, cleaning at the interconnect level, resist stripping and polymer removal, cleaning and contamination control of various new materials, wafer backside cleaning and cleaning following Chemical-Mechanical-Polishing (CMP).
"Synopsis" may belong to another edition of this title.
Mispah books
Redhill, Surrey, United Kingdom
AbeBooks seller since April 15, 2021
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