ULSI Semiconductor Technology Atlas
Language: English
Published by John Wiley & Sons, 2003
- Hardcover
- New
Seller: Majestic Books, Hounslow, United KingdomMajestic Books
AbeBooks seller since January 19, 2007
Condition: New
£ 241.91
Quantity: 3 available
Add to basketItem description from seller
pp. xii + 666 Illus.
Seller Inventory # 7478134
- Title
- ULSI Semiconductor Technology Atlas
- Author
- Lu Chih?Yuan Tung Chih?Hang Tung Chih-Hang Sheng George T. T. LU Chih-Yuan
- Publisher
- John Wiley & Sons
- Publication year
- 2003
- Condition
- New
- Binding
- Hardcover
- Language
- English
- ISBN 10
- 0471457728
- ISBN 13
- 9780471457725
The natural outgrowth of VLSI (Very Large Scale Integration), Ultra Large Scale Integration (ULSI) refers to semiconductor chips with more than 10 million devices per chip. Written by three renowned pioneers in their field, ULSI Semiconductor Technology Atlas uses examples and TEM (Transmission Electron Microscopy) micrographs to explain and illustrate ULSI process technologies and their associated problems.
The first book available on the subject to be illustrated using TEM images, ULSI Semiconductor Technology Atlas is logically divided into four parts:
* Part I includes basic introductions to the ULSI process, device construction analysis, and TEM sample preparation
* Part II focuses on key ULSI modules--ion implantation and defects, dielectrics and isolation structures, silicides/salicides, and metallization
* Part III examines integrated devices, including complete planar DRAM, stacked cell DRAM, and trench cell DRAM, as well as SRAM as examples for process integration and development
* Part IV emphasizes special applications, including TEM in advanced failure analysis, TEM in advanced packaging development and UBM (Under Bump Metallization) studies, and high-resolution TEM in microelectronics
This innovative guide also provides engineers and managers in the microelectronics industry, as well as graduate students, with:
* More than 1,100 TEM images to illustrate the science of ULSI
* A historical introduction to the technology as well as coverage of the evolution of basic ULSI process problems and issues
* Discussion of TEM in other advanced microelectronics devices and materials, such as flash memories, SOI, SiGe devices, MEMS, and CD-ROMs
"Synopsis" may belong to another edition of this title.
About the Author
GEORGE T. T. SHENG was the first to develop cross-sectioning samples of TEM studies of semiconductor devices and has been involved with many other groundbreaking projects at Bell Labs.
CHIH-YUAN LU is Chairman and CEO of Ardentec Corp., an ULSI testing service company. He is also CTO of Macronix International Co., Ltd., the eighth largest worldwide NVM semiconductor company.
"About the title" may belong to another edition of this title.
Majestic Books
Hounslow, United Kingdom
AbeBooks seller since January 19, 2007
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