Thin Film Processes

John L. Vossen,Werner Kern

ISBN 10: 0127282505 / ISBN 13: 9780127282503

Published by Academic Press, 1979

About this Item

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Seller Inventory # S_391108432

Bibliographic Details

• Title: Thin Film Processes
• Publisher: Academic Press
• Publication Date: 1979
• Language: English
• ISBN 10: 0127282505
• ISBN 13: 9780127282503
• Binding: hardcover
• Condition: Acceptable

About this title

Synopsis

Remarkable advances have been made in recent years in the science and technology of thin film processes for deposition and etching. It is the purpose of this book to bring together tutorial reviews of selected filmdeposition and etching processes from a process viewpoint. Emphasis is placed on the practical use of the processes to provide working guidelines for their implementation, a guide to the literature, and an overview of each process.