Surfaces, Interfaces, and Thin Films for Microelectronics
Irene Eugene A.
ISBN 10: 0470174471 ISBN 13: 9780470174470
Published by John Wiley & Sons, 2008
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Hardcover
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About this Item
Description:
pp. xiii + 515. Seller Inventory # 18283143
Synopsis:
The practical, accessible independent-study guide and text on surface science fundamentals and microelectronics processes, this reference explains key concepts and important analytical techniques. It discusses films and interfaces, electronic passivation of semiconductor-dielectric film interfaces, the Si-SiO2 interface, and other MOSFET interfaces, and includes figures, charts, exercises, and examples of applications. This is the ideal guide to help professionals in the electronics industry get up to speed fast. It is also an excellent text for upper-level graduate and undergraduate students.
About the Author:
Eugene A. Irene, PhD, is Professor of Chemistry at the University of North Carolina, Chapel Hill.?Prior to that appointment, he worked in the Thomas J. Watson Research Center at IBM for ten years. Professor Irene has written more than 250 journal publications and is the author of various books, including Electronic Materials Science (Wiley). He is coeditor of Handbook of Ellipsometry and numerous scientific reviews and book chapters.
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Bibliographic Details
Title: Surfaces, Interfaces, and Thin Films for ...
Publisher: John Wiley & Sons
Publication Date: 2008
Binding: Hardcover
Condition: New