Stress Analysis of Silicon Carbide Microelectromechanical Systems Using Raman Spectroscopy

Language: English

Published by BIBLIOSCHOLAR, 2012

128686237X / 9781286862377

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Seller: moluna, Greven, Germanymoluna

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KlappentextrnrnDuring the fabrication of Micro-Electro-Mechanical Systems (MEMS), residual stress is often induced in the thin films that are deposited to create these systems. These stresses can cause the device to fail due to buckling, curling.

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Title
Stress Analysis of Silicon Carbide Microelectromechanical Systems Using Raman Spectroscopy
Author
Ness, Stanley J.
Publisher
BIBLIOSCHOLAR
Publication year
2012
Condition
New
Binding
Soft cover
Language
English
ISBN 10
128686237X
ISBN 13
9781286862377

moluna

Greven, Germany

5-star seller

AbeBooks seller since July 9, 2020

Shipping rates from Germany to U.S.A.

Item26 to 60 business days26 to 60 business days
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