Sputtering by Particle Bombardment III: Characteristics of Sputtered Particles, Technical Applications (Topics in Applied Physics)

Behrisch, R. (Contributor) / McClanahan, E.D. (Contributor) / Hofer, W.O. (Contributor) / Hauffe, W. (Contributor) / Laegreid, N. (Contributor) / Sundqvist, B.U.R. (Contributor) / Yu, M.L. (Contributor) / Wittmaack, K. (Contributor)

ISBN 10: 3662311046 / ISBN 13: 9783662311042

Published by Springer, 2014

About this Item

436 pages. 9.30x6.20x1.10 inches. In Stock.

Seller Inventory # x-3662311046

Bibliographic Details

• Title: Sputtering by Particle Bombardment III: Characteristics of Sputtered Particles, Technical Applications (Topics in Applied Physics)
• Publisher: Springer
• Publication Date: 2014
• Language: English
• ISBN 10: 3662311046
• ISBN 13: 9783662311042
• Binding: Paperback
• Condition: Brand New
• Weight: 0.57 kilograms

About this title

Synopsis

Sputtering, the ejection of atoms from the surface of a solid bombarded by energetic particles, is a widely observed phenomenon that has many applications in today's experimental physics and technology. This final volume in a three-part review of sputtering deals with the characterization of the sputtered particles and applications of the technique. It will be of interest to researchers in universities and in industry.