Spectroscopic Ellipsometry and Reflectometry A User's Guide

Harland G. Tompkins/ William A. McGahan

ISBN 10: 0471181722 / ISBN 13: 9780471181729

Published by Wiley-Interscience, 1999

About this Item

1st edition. 228 pages. 10.00x6.50x1.00 inches. In Stock.

Seller Inventory # x-0471181722

Bibliographic Details

• Title: Spectroscopic Ellipsometry and Reflectometry A User's Guide
• Publisher: Wiley-Interscience
• Publication Date: 1999
• Language: English
• ISBN 10: 0471181722
• ISBN 13: 9780471181729
• Binding: Hardcover
• Condition: Brand New

About this title

Synopsis

While single wave ellipsometry has been around for years, spectroscopic ellipsometry is fast becoming the method of choice for measuring the thickness and optical properties of thin films. This book provides the first practical introduction to spectroscopic ellipsometry and the related techniques of reflectometry. A guide for practitioners and researchers in a variety of disciplines, it addresses a broad range of applications in physics, chemistry, electrical engineering, and materials science.

About the Author

Harland Tompkins retired from full-time employment in 2001. During his full-time employment, he was employed by General Electric Co., Bell Laboratories, the Idaho National Engineering Lab, and Motorola.

William A. McGahan is the author of Spectroscopic Ellipsometry and Reflectometry: A User's Guide, published by Wiley.