Sensor-based Modeling and Monitoring of Chemical Mechanical Polishing

Rao, Prahalada; Komanduri, Ranga; Bukkapatnam, Satish

ISBN 10: 363903564X ISBN 13: 9783639035643
Published by VDM Verlag Dr. Müller, 2008
Language: English
Condition: Used - As new Soft cover

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Used - Soft cover

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