Sensor-based Modeling and Monitoring of Chemical Mechanical Polishing: Analysis of Experimental Sensor Data Integrating Statistical Time Series Analysis and Nonlinear Dynamics (Chaos Theory) Paradigms

Language: English

Published by VDM Verlag Dr. Mller 2008-12-03, 2008

363903564X / 9783639035643

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Seller: Chiron Media, Wallingford, United KingdomChiron Media

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Title
Sensor-based Modeling and Monitoring of Chemical Mechanical Polishing: Analysis of Experimental Sensor Data Integrating Statistical Time Series Analysis and Nonlinear Dynamics (Chaos Theory) Paradigms
Author
Prahalada Rao
Publisher
VDM Verlag Dr. Mller 2008-12-03
Publication year
2008
Condition
New
Binding
Paperback
Language
English
ISBN 10
363903564X
ISBN 13
9783639035643

Chiron Media

Wallingford, United Kingdom

5-star seller

AbeBooks seller since August 2, 2010

Shipping rates from United Kingdom to U.S.A.

Item14 to 21 business days14 to 21 business days
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