Sensor-based Modeling and Monitoring of Chemical Mechanical Polishing : Analysis of Experimental Sensor Data Integrating Statistical Time Series Analysis and Nonlinear Dynamics (Chaos Theory) Paradigms
Language: English
Published by VDM Verlag Dr. Müller, 2008
- Softcover
- New
Seller: AHA-BUCH GmbH, Einbeck, GermanyAHA-BUCH GmbH
AbeBooks seller since August 14, 2006
Condition: New
£ 76.18
Quantity: 2 available
Add to basketItem description from seller
nach der Bestellung gedruckt Neuware - Printed after ordering - This book provides a framework for real time controlof the Chemical Mechanical Planarization (CMP)process based on combining nonlinear dynamicsprinciples with statistical process monitoringapproaches. CMP has a directbearing on the computational speed and dimensionalcharacteristics of solid state devices. The challengein CMP may be narrowed to domains envelopingproductivity, measured in terms of material removalrate (MRR), and quality which is usually specified interms of surface roughness - Ra, within wafernon-uniformity (WIWNU), defect rate, etc. In thiswork, experimental investigations of CMP are executedwith the aid of sensors. The analysis of the datareveals the presence of pronounced stochastic-dynamiccharacteristics. As a result, we derive a processcontrol method integrating statistical time seriesanalysis and nonlinear dynamics which captures ~ 80%(linear R-sq) of the variation in MRR. In this mannera novel paradigm for effective process control in CMPhas been presented.…
Seller Inventory # 9783639035643
- Title
- Sensor-based Modeling and Monitoring of Chemical Mechanical Polishing : Analysis of Experimental Sensor Data Integrating Statistical Time Series Analysis and Nonlinear Dynamics (Chaos Theory) Paradigms
- Author
- Prahalada Rao
- Publisher
- VDM Verlag Dr. Müller
- Publication year
- 2008
- Condition
- Neu
- Binding
- Taschenbuch
- Language
- English
- ISBN 10
- 363903564X
- ISBN 13
- 9783639035643
- Item weight
- 294 grams
- Dimensions
- 220x150x13 mm
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