The Science and Engineering of Microelectronic Fabrication (The Oxford Series in Electrical and Computer Engineering)

Campbell, Stephen A.

ISBN 10: 0195105087 / ISBN 13: 9780195105087

Published by Oxford University Press, 1996

About this Item

Item in very good condition! Textbooks may not include supplemental items i.e. CDs, access codes etc.

Seller Inventory # 00074089260

Bibliographic Details

• Title: The Science and Engineering of Microelectronic Fabrication (The Oxford Series in Electrical and Computer Engineering)
• Publisher: Oxford University Press
• Publication Date: 1996
• Language: English
• ISBN 10: 0195105087
• ISBN 13: 9780195105087
• Binding: Hardcover
• Condition: Acceptable

About this title

Synopsis

The Science and Engineering of Microelectronic Fabrication provides an introduction to microelectronic processing. Geared towards a wide audience, it may be used as a textbook for both first year graduate and upper level undergraduate courses and as a handy reference for professionals. The text covers all the basic unit processes used to fabricate integrated circuits including photolithography, plasma and reactive ion etching, ion implantation, diffusion, oxidation, evaporation, vapour phase epitaxial growth, sputtering and chemical vapour deposition. Advanced processing topics such as rapid thermal processing, nonoptical lithography, molecular beam epitaxy, and metal organic chemical vapour deposition are also presented. The physics and chemistry of each process is introduced along with descriptions of the equipment used for the manufacturing of integrated circuits. The text also discusses the integration of these processes into common technologies such as CMOS, double poly bipolar, and GaAs MESFETs. Complexity/performance tradeoffs are evaluated along with a description of the current state-of-the-art devices. Each chapter includes sample problems with solutions. The book also makes use of the process simulation package SUPREM to demonstrate impurity profiles of practical interest.