Principles and Practice of Thin-Film Deposition (Paperback)
Language: English
Published by Independently Published, 2026
- Softcover
- New
Seller: Grand Eagle Retail, Bensenville, IL, U.S.A.Grand Eagle Retail
AbeBooks seller since October 12, 2005
Condition: New
£ 125.31
Quantity: 1 available
Add to basketItem description from seller
Paperback. How do atomic-scale surface reactions become reliable, high-performance coatings used in semiconductor devices, energy systems, optics, and advanced manufacturing?Principles and Practice of Thin-Film Deposition provides a rigorous, application-focused guide to the science and engineering behind modern coating and layer-growth methods. Designed for graduate students, researchers, materials scientists, process engineers, and technical professionals, it connects fundamental physics and chemistry with the equipment, controls, diagnostics, and manufacturing decisions that determine real-world results.Beginning with vacuum science, gas kinetics, thermodynamics, nucleation, growth modes, microstructure, defects, stress, adhesion, and contamination control, the book builds the foundation required to understand why deposited layers behave as they do. It then examines thermal evaporation, DC and RF magnetron sputtering, reactive sputtering, HiPIMS, ion-assisted methods, pulsed laser deposition, chemical vapor deposition, plasma-enhanced CVD, metalorganic CVD, low-pressure CVD, atomic layer deposition, molecular beam epitaxy, and silicon epitaxy.Inside, you will learn to: - Relate pressure, temperature, flow, power, bias, geometry, and surface chemistry to thickness, composition, texture, density, stress, and uniformity.- Compare major deposition platforms and select suitable methods for metals, dielectrics, semiconductors, optical stacks, barriers, hard coatings, and conformal three-dimensional structures.- Understand reactor designs, vacuum pumps, gauges, precursor delivery systems, plasma behavior, target erosion, target poisoning, and process-safety requirements.- Apply structural, chemical, electrical, mechanical, and optical characterization methods, including XRD, XRR, SEM, TEM, AFM, XPS, SIMS, ellipsometry, Hall measurement, nanoindentation, and wafer-curvature analysis.- Use design of experiments, statistical process control, process-window development, yield modeling, simulation, and qualification strategies to improve repeatability and scale-up.- Explore applications in CMOS fabrication, advanced memory, photovoltaics, solid-state batteries, optical coatings, MEMS, photonics, flexible electronics, and surface engineering.Supported by quantitative explanations, technical diagrams, key equations, reference tables, a glossary, and process-selection appendices, this textbook gives you the framework needed to analyze, develop, troubleshoot, and optimize deposition processes with greater confidence. This item is printed on demand. Shipping may be from multiple locations in the US or from the UK, depending on stock availability.…
Seller Inventory # 9798186673842
- Title
- Principles and Practice of Thin-Film Deposition (Paperback)
- Author
- Marcus T. Eberhardt
- Publisher
- Independently Published
- Publication year
- 2026
- Condition
- new
- Binding
- Paperback
- Language
- English
- ISBN 13
- 9798186673842
Principles and Practice of Thin-Film Deposition provides a rigorous, application-focused guide to the science and engineering behind modern coating and layer-growth methods. Designed for graduate students, researchers, materials scientists, process engineers, and technical professionals, it connects fundamental physics and chemistry with the equipment, controls, diagnostics, and manufacturing decisions that determine real-world results.
Beginning with vacuum science, gas kinetics, thermodynamics, nucleation, growth modes, microstructure, defects, stress, adhesion, and contamination control, the book builds the foundation required to understand why deposited layers behave as they do. It then examines thermal evaporation, DC and RF magnetron sputtering, reactive sputtering, HiPIMS, ion-assisted methods, pulsed laser deposition, chemical vapor deposition, plasma-enhanced CVD, metalorganic CVD, low-pressure CVD, atomic layer deposition, molecular beam epitaxy, and silicon epitaxy.
Inside, you will learn to:
• Relate pressure, temperature, flow, power, bias, geometry, and surface chemistry to thickness, composition, texture, density, stress, and uniformity.
• Compare major deposition platforms and select suitable methods for metals, dielectrics, semiconductors, optical stacks, barriers, hard coatings, and conformal three-dimensional structures.
• Understand reactor designs, vacuum pumps, gauges, precursor delivery systems, plasma behavior, target erosion, target poisoning, and process-safety requirements.
• Apply structural, chemical, electrical, mechanical, and optical characterization methods, including XRD, XRR, SEM, TEM, AFM, XPS, SIMS, ellipsometry, Hall measurement, nanoindentation, and wafer-curvature analysis.
• Use design of experiments, statistical process control, process-window development, yield modeling, simulation, and qualification strategies to improve repeatability and scale-up.
• Explore applications in CMOS fabrication, advanced memory, photovoltaics, solid-state batteries, optical coatings, MEMS, photonics, flexible electronics, and surface engineering.
Supported by quantitative explanations, technical diagrams, key equations, reference tables, a glossary, and process-selection appendices, this textbook gives you the framework needed to analyze, develop, troubleshoot, and optimize deposition processes with greater confidence.
"Synopsis" may belong to another edition of this title.
Grand Eagle Retail
Bensenville, IL, U.S.A.
AbeBooks seller since October 12, 2005
Shipping rates within U.S.A.
| Item | 6 to 14 business days | 6 to 16 business days |
|---|---|---|
| First item | £ 0.00 | £ 0.00 |
Payment methods
Seller's business information
APOLLO ONLINE CORP.
605 Geddes Street
Wilmington, DE U.S.A. 19805
Terms of sale
We guarantee the condition of every book as it¿s described on the Abebooks web sites. If you¿ve changed
your mind about a book that you¿ve ordered, please use the Ask bookseller a question link to contact us
and we¿ll respond within 2 business days.
Books ship from California and Michigan.
Right of withdrawal
If you are a consumer you can withdraw from the contract in accordance with the following. Consumer means any natural person who is acting for purposes which are outside his trade, business, craft or profession.
Information regarding the right of withdrawal
Statutory right to withdraw
You have the right to withdraw from this contract within 14 days without giving any reason.
The withdrawal period will expire after 14 days from the day on which you acquire, or a third party other than the carrier and indicated by you acquires, physical possession of the last good or the last lot or piece.
To exercise the right of withdrawal, electronically fill in and submit a clear statement on our website, under "My Purchases" in "My Account". We will communicate to you an acknowledgement of receipt of such a withdrawal on a durable medium (e.g. by e-mail) without delay.
To meet the withdrawal deadline, it is sufficient for you to send your communication concerning your exercise of the right of withdrawal before the withdrawal period has expired.
Effects of withdrawal
If you withdraw from this contract, we will reimburse to you all payments received from you, including the costs of delivery (except for the supplementary costs arising if you chose a type of delivery other than the least expensive type of standard delivery offered by us).
We may make a deduction from the reimbursement for loss in value of any goods supplied, if the loss is the result of unnecessary handling by you.
We will make the reimbursement without undue delay, and not later than 14 days after the day on which we are informed about your decision to withdraw from this contract.
We will make the reimbursement using the same means of payment as you used for the initial transaction, unless you have expressly agreed otherwise; in any event, you will not incur any fees as a result of such reimbursement.
We may withhold reimbursement until we have received the goods back, or you have supplied evidence of having sent back the goods, whichever is the earliest.
You shall send back the goods or hand them over to Grand Eagle Retail, Bensenville, Illinois, U.S.A., without undue delay and in any event not later than 14 days from the day on which you communicate your withdrawal from this contract to us. The deadline is met if you send back the goods before the period of 14 days has expired. You will have to bear the direct cost of returning the goods. You are only liable for any diminished value of the goods resulting from the handling other than what is necessary to establish the nature, characteristics and functioning of the goods.
Exceptions to the right of withdrawal
The right of withdrawal does not apply to:
- The delivery of newspapers, journals or magazines with the exception of subscription contracts; and
- The supply of digital content which is not supplied on a tangible medium (e.g. on a CD or DVD) if you accepted when you placed your order that we could start to deliver it, and that you could not withdraw once delivery had started.
Shipping terms
Orders usually ship within 2 business days. All books within the US ship free of charge. Delivery is 4-14 business days anywhere in the United States.
Books ship from California and Michigan.
If your book order is heavy or oversized, we may contact you to let you know extra shipping is required.