Predictive simulation of semiconductor processing: status and challenges. Springer series in materials science; 72.

Dabrowski, Jarek [Hrsg.] and E. R. Weber (ed.):

ISBN 10: 3540204814 ISBN 13: 9783540204817
Published by Berlin ; Heidelberg ; New York ; Hong Kong ; London ; Milan ; Paris ; Tokyo : Springer, 2004
Language: English
Condition: Used - Very good Hardcover

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