Practical MEMS: Analysis and Design of Microsystems, MEMS Sensors (accelerometers, Pressure Sensors, Gyroscopes), Sensor Electronics, Actuators, RF MEMS, Optical MEMS, and Microfluidic Systems

Ville Kaajakari

ISBN 10: 0982299109 ISBN 13: 9780982299104
Published by Small Gear Publishing, 2009
Language: English
Condition: New Hardcover

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