Plasma-Surface Interactions and Processing of Materials : Proceedings
Auciello, Orlando (EDT)
ISBN 10: 0792305841 ISBN 13: 9780792305842
Published by Springer, 1990
Used
Hardcover
From
GreatBookPrices, Columbia, MD, U.S.A.
Seller rating 5 out of 5 stars
AbeBooks Seller since 6 April 2009
This specific item is no longer available.
About this Item
Description:
Unread book in perfect condition. Seller Inventory # 3187601
Synopsis:
An understanding of the processes involved in the basic and applied physics and chemistry of the interaction of plasmas with materials is vital to the evolution of technologies such as those relevant to microelectronics, fusion and space.
The subjects dealt with in the book include: the physics and chemistry of plasmas, plasma diagnostics, physical sputtering and chemical etching, plasma assisted deposition of thin films, ion and electron bombardment, and plasma processing of inorganic and polymeric materials.
The book represents a concentration of a substantial amount of knowledge acquired in this area - knowledge which was hitherto widely scattered throughout the literature - and thus establishes a baseline reference work for both established and tyro research workers.
"About this title" may belong to another edition of this title.
Bibliographic Details
Title: Plasma-Surface Interactions and Processing ...
Publisher: Springer
Publication Date: 1990
Binding: Hardcover
Condition: As New