Plasma Etching: Fundamentals and Applications (Series on Semiconductor Science and Technology)

Sugawara, M.

ISBN 10: 019856287X ISBN 13: 9780198562870

Published by Oxford University Press, 1998

Language: English

Condition: New Hardcover

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Bibliographic Details

Title

Plasma Etching: Fundamentals and Applications (Series on Semiconductor Science and Technology)

Publisher

Oxford University Press

Publication Date

1998

Language

English

ISBN 10

019856287X

ISBN 13

9780198562870

Binding

Hardcover

Condition

New

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About this title

Synopsis

The focus of this book is the remarkable advances in understanding of low pressure RF (radio frequency) glow discharges. A basic analytical theory and plasma physics are explained. Plasma diagnostics are also covered before the practicalities of etcher use are explored.

About the Author

Professor Minoru Sugawara, Hachinohe Institute of Technology, Hachinohe-city, Aomori 031, Japan. Fax: (0) 178 25 1430

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