Focussing on the physics of low-temperature radio frequency plasmas, for graduate students and researchers in applied physics and electrical engineering.

About the Authors:

Pascal Chabert is currently Research Director within CNRS. He leads the Low-Temperature Plasmas group of the Laboratoire de Physique des Plasmas at Ecole Polytechnique. His expertise is in plasma physics and plasma processing.

Nicholas Braithwaite is Professor of Engineering Physics at The Open University, where his research group work on the physics of 'technological' plasmas. He has been on the editorial board of the journal Plasma Sources Science and Technology since 1998.

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Physics of Radio-Frequency Plasmas

Chabert, Pascal; Braithwaite, Nicholas

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