Particles on Surfaces: Detection, Adhesion and Removal, Volume 8

Kash L. Mittal

ISBN 10: 9067643920 / ISBN 13: 9789067643924

Published by Brill, 2003

About this Item

New Book. Shipped from UK. Established seller since 2000.

Seller Inventory # FT-9789067643924

Bibliographic Details

• Title: Particles on Surfaces: Detection, Adhesion and Removal, Volume 8
• Publisher: Brill
• Publication Date: 2003
• Language: English
• ISBN 10: 9067643920
• ISBN 13: 9789067643924
• Binding: HRD
• Condition: New

About this title

Synopsis

This volume documents the proceedings of the 8th International Symposium on Particles on Surfaces: Detection, Adhesion and Removal held in Providence, Rhode Island, June 24–26, 2002.
The study of particles on surfaces is extremely crucial in a host of diverse technological areas, ranging from microelectronics to optics to biomedical. In a world of shrinking dimensions and with the tremendous interest in various nanotechnologies, the need to understand the physics of nanoparticles becomes quite patent. With the interest in and concern with nanoparticles comes the need for new and more sensitive metrological and analysis techniques to detect, quantitate, analyze and characterize very small particles on a host of substrates.
This volume contains a total of 21 papers covering many ramifications of particles on surfaces. All manuscripts were rigorously peer-reviewed and all were revised and properly edited before inclusion in this volume. The book is divided into two parts: Particle Analysis/Characterization and General Cleaning-Related Topics and Particle Adhesion and Removal. The topics covered include: nature and characterization of small particles; surface and micro-analytical methods for particle identification; haze as a new method to monitor nano-sized particles; particle transport and adhesion in ion-beam sputter deposition process; particle deposition during immersion rinsing; ice-air blast cleaning; rectangular jets for surface decontamination; factors important in particle adhesion and removal; mechanics of nanoparticle adhesion; particle adhesion on nanoscale rough surfaces; various techniques for cleaning or removal of particles from different substrates including wet cleaning, use of modified SC-1 solutions, use of surfactants, ozonated DI water, ultrasonic, megasonic, laser, energetic clusters; and post-CMP cleaning.
This volume, together with its predecessors, will be of immense value to anyone interested in the world of particles on surfaces, and will serve as a resource for information on contemporary R&D activity in this extremely technologically important area.

About the Author

Kash L. Mittal