Optical microlithography IV: March 13-14, 1985, Santa Clara, California (Proceedings of SPIE--the International Society for Optical Engineering). This item is unavailable.

Language: English

Published by SPIE--the International Society for Optical Engine, 1985

0892525738 / 9780892525737

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Bibliographic details

Title
Optical microlithography IV: March 13-14, 1985, Santa Clara, California (Proceedings of SPIE--the International Society for Optical Engineering)
Author
Harry L. (Editor) Stover
Publisher
SPIE--the International Society for Optical Engine
Publication year
1985
Condition
Very Good
Dust jacket
Dust Jacket Included
Book Type
book
Binding
paperback
Language
English
ISBN 10
0892525738
ISBN 13
9780892525737