Microsensors, MEMS, and Smart Devices

Gardner, Julian W.

ISBN 10: 047186109X / ISBN 13: 9780471861096

Published by John Wiley and Sons, 2007

About this Item

This is an ex-library book and may have the usual library/used-book markings inside.This book has hardback covers. In good all round condition. No dust jacket. Please note the Image in this listing is a stock photo and may not match the covers of the actual item,1150grams, ISBN:9780471861096.

Seller Inventory # 5752608

Bibliographic Details

• Title: Microsensors, MEMS, and Smart Devices
• Publisher: John Wiley and Sons
• Publication Date: 2007
• Language: English
• ISBN 10: 047186109X
• ISBN 13: 9780471861096
• Binding: Hardcover
• Condition: Good
• Weight: 1150 grams
• Seller catalogs:
  • Science & Technology

About this title

Synopsis

Microsensors and MEMS (micro-electro-mechanical systems) are revolutionising the semiconductor industry. A microsystem or the so-called "system-on-a-chip" combines microelectronic circuitry with microsensors and microactuators. This emergent field has seen the development of applications ranging from the electronic nose and intelligent ear to micro-tweezers and the modern ink-jet nozzle.
Providing a complete overview of microsensor technologies, this unique reference addresses vital integration issues for the successful application of microsensors, MEMS and smart devices.
Features include:
* Review of traditional and emerging fabrication processes including bulk and silicon micromachining, microstereolithography and polymer processing methods.
* Focus on the use of IDT (interdigital transducer) microsensors in the development of low energy budget, wireless MEMS or micromachines.
* Coverage of the katest applications in smart devices including the electronic nose, tongue and finger, along with smart sensors and strcutures such as smart skin.
* An overview of the development of intelligent sensing devices through the use of sensor arrays, parametric compensation of sensor sugnals and ASIC technology.
* Comprehensive appendices outlining vital MEMS material properties, relevant web sites and a guide to key institutions active in the field.
Microsensors, MEMS and Smart Devices presents readers with the means to understand and evaluate microsystems. Advanced students and researchers in microelectronics, engineers and developers of microsensor systems will find this comprehensive treatment essential reading. Detailed coverage of material properties makes this an important reference work for mechnical engineers, physicists and material scientists working in the field.

About the Author

Julian W. Gardner is the author of Microsensors, MEMS, and Smart Devices, published by Wiley.

Vijay K. Varadan is the author of Microsensors, MEMS, and Smart Devices, published by Wiley.

Osama O. Awadelkarim is the author of Microsensors, MEMS, and Smart Devices, published by Wiley.