Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology (Plastics Engineering)
Nonogaki, Saburo, Takumi, Ueno, Ito, Toshio
ISBN 10: 0824799518 ISBN 13: 9780824799519
Published by CRC Press, 1998
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Synopsis:
"Explores the science and technology of lithographic processes and resist materials and summarizes the most recent innovations in semiconductor manufacturing. Considers future trends in lithography and resist material technology. Reviews the interaction of light, electron beams, and X-rays with resist materials."
About the Author: Saburo Nonogaki, Ueno Takumi, Toshio Ito
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Title: Microlithography Fundamentals in ...
Publisher: CRC Press
Publication Date: 1998
Binding: Hardcover
Condition: Like New
Book Type: book
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