Micro Process Engineering. Fundamentals, Devices, Fabrication, and Applications. (=Advanced micro & nanosystems ; Vol. 5).
Kockmann, Norbert (ed.):
Published by Weinheim : Wiley-VCH-Verlag, 2006
Language: English
Hardcover
From Antiquariat Thomas Haker GmbH & Co. KG, Berlin, Germany
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