Micro-Electro-Mechanical Systems (MEMS) 1998: Micro-Manuacturing Processes in MEMS and Other Advanced Systems. Applications of Micro-Fabrication to Fluid Mechanics. Micro-Electro-Mechanical Systems. Computational Methods for Analysis, Design and Simulat

IZhang, Xiang, Aluru, Narayan R., Lin, Liwei, Forster, Fred K. (eds.)

ISBN 10: 079181596X / ISBN 13: 9780791815960

Published by The American Society of Mechanical Engineers, 1998

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Bibliographic Details

Title: Micro-Electro-Mechanical Systems (MEMS) 1998...

Publisher: The American Society of Mechanical Engineers

Publication Date: 1998

Binding: Soft cover

Condition: Very Good

About this title

Synopsis:

Nearly 100 papers from four symposia consider such aspects as micro-manufacturing processes, applications of microfabrication to fluid mechanics, devices, tribology, material issues, actuators and actuation mechanisms, sensors, processes, tools, and computational methods. Specific topics include pressure and power generation during explosive vapori