Metal Impurities in Silicon- and Germanium-Based Technologies : Origin, Characterization, Control, and Device Impact
Language: English
Published by Springer, 2019
Series: Book 186 of 233 - Springer Series in Materials Science
- Softcover
- New
Seller: AHA-BUCH GmbH, Einbeck, GermanyAHA-BUCH GmbH
AbeBooks seller since August 14, 2006
Condition: New
£ 168.66
Quantity: 1 available
Add to basketItem description from seller
Druck auf Anfrage Neuware - Printed after ordering - This book provides a unique review of various aspects of metallic contamination in Si and Ge-based semiconductors. It discusses all of the important metals including their origin during crystal and/or device manufacturing, their fundamental properties, their characterization techniques and their impact on electrical devices' performance. Several control and possible gettering approaches are addressed.The book offers a valuable reference guide for all researchers and engineers studying advanced and state-of-the-art micro- and nano-electronic semiconductor devices and circuits. Adopting an interdisciplinary approach, it combines perspectives from e.g. material science, defect engineering, device processing, defect and device characterization, and device physics and engineering.
Seller Inventory # 9783030067472
- Title
- Metal Impurities in Silicon- and Germanium-Based Technologies : Origin, Characterization, Control, and Device Impact
- Author
- Cor Claeys
- Publisher
- Springer
- Publication year
- 2019
- Condition
- Neu
- Binding
- Taschenbuch
- Language
- English
- ISBN 10
- 3030067475
- ISBN 13
- 9783030067472
- Item weight
- 709 grams
- Dimensions
- 235x155x26 mm
- Series
- Book 186 of 233: Springer Series in Materials Science
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