Mems/Nems, Handbook Techniques and Applications - 5 volume set : (1) Design Methods, (2) Fabrication Techniques, (3) Manufacturing Methods, (4) Sensors and Actuators, (5) Medical Applications and MOEMS.
Leondes, Cornelius T. (ed.):
From Antiquariat Thomas Haker GmbH & Co. KG, Berlin, Germany
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