This book describes LSI process technology, and focuses on the rapid progress of state-of-the-art dynamic random access memory (DRAM) process technologies―the longstanding technology driver of Si ULSI―as they advance from the 1 Kbit to the Gbit DRAM era.

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Hiroyuki Tango

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Mega-Bit Memory Technology - From Mega-Bit to Giga-Bit: From Mega-Bit to Giga-Bit

Tango, Hiroyuki (Edited by)

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