Materials, Technology and Reliability for Advanced Interconnects and Low-K Dielectrics: Proceedings of Symposium Helt April 23-27, 2000, San Francisco, California U.S.A.

G.S. Oehrlein, K. Maex, Y.-C. Joo, S. Ogawa, J.T. Wetzel, Editors

ISBN 10: 155899520X ISBN 13: 9781558995208
Published by Materials Research Society, 2001
Language: English
Condition: Used - Very good Hardcover

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