Materials and Process Characterization: VLSI Electronics Microstructure Science, Vol. 6

Einspruch, Norman G. (Editor)/ Larrabee, Graydon B. (Series Editor)

ISBN 10: 1483204308 / ISBN 13: 9781483204307

Published by Academic Press, 2015

About this Item

614 pages. 9.25x6.00x1.39 inches. In Stock.

Seller Inventory # zk1483204308

Bibliographic Details

• Title: Materials and Process Characterization: VLSI Electronics Microstructure Science, Vol. 6
• Publisher: Academic Press
• Publication Date: 2015
• Language: English
• ISBN 10: 1483204308
• ISBN 13: 9781483204307
• Binding: Paperback
• Condition: Brand New

About this title

Synopsis

VLSI Electronics: Microstructure Science, Volume 6: Materials and Process Characterization addresses the problem of how to apply a broad range of sophisticated materials characterization tools to materials and processes used for development and production of very large scale integration (VLSI) electronics. This book discusses the various characterization techniques, such as Auger spectroscopy, secondary ion mass spectroscopy, X-ray topography, transmission electron microscopy, and spreading resistance. The systematic approach to the technologies of VLSI electronic materials and device manufacture are also considered. This volume is beneficial to materials scientists, chemists, and engineers who are commissioned with the responsibility of developing and implementing the production of materials and devices to support the VLSI era.