Title: MEMS/NEMS Sensors: Fabrication and Application (Paperback or Softback)
Publisher: Mdpi AG 11/20/2019
Publication Date: 2019
Language: English
ISBN 10: 3039216341
ISBN 13: 9783039216345
Binding: Paperback or Softback
Condition: New
Book Type: Book

About this title

Synopsis

Due to the ever-expanding applications of micro/nano-electromechanical systems (NEMS/MEMS) as sensors and actuators, interest in their development has rapidly expanded over the past decade. Encompassing various excitation and readout schemes, the MEMS/NEMS devices transduce physical parameter changes, such as temperature, mass or stress, caused by changes in desired measurands, to electrical signals that can be further processed. Some common examples of NEMS/MEMS sensors include pressure sensors, accelerometers, magnetic field sensors, microphones, radiation sensors, and particulate matter sensors.

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