MEMSNEMS Sensors Fabrication and Application
Sold by PBShop.store US, Wood Dale, IL, U.S.A.
AbeBooks Seller since 7 April 2005
New - Soft cover
Condition: New
Quantity: Over 20 available
Add to basketSold by PBShop.store US, Wood Dale, IL, U.S.A.
AbeBooks Seller since 7 April 2005
Condition: New
Quantity: Over 20 available
Add to basketNew Book. Shipped from UK. THIS BOOK IS PRINTED ON DEMAND. Established seller since 2000.
Seller Inventory # L0-9783039216345
Due to the ever-expanding applications of micro/nano-electromechanical systems (NEMS/MEMS) as sensors and actuators, interest in their development has rapidly expanded over the past decade. Encompassing various excitation and readout schemes, the MEMS/NEMS devices transduce physical parameter changes, such as temperature, mass or stress, caused by changes in desired measurands, to electrical signals that can be further processed. Some common examples of NEMS/MEMS sensors include pressure sensors, accelerometers, magnetic field sensors, microphones, radiation sensors, and particulate matter sensors.
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