MEMS Pressure Sensors: Fabrication and Process Optimization. This item is unavailable.
Language: English
Published by Ifsa Publishing, 2012
- Hardcover
- New
Seller: Ria Christie Collections, Uxbridge, United KingdomRia Christie Collections
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Condition: New
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Item description from seller
In English.
Seller Inventory # ria9788461622078_new
- Title
- MEMS Pressure Sensors: Fabrication and Process Optimization
- Author
- Alvi, Parvej Ahmad
- Publisher
- Ifsa Publishing
- Publication year
- 2012
- Condition
- New
- Binding
- Hardcover
- Language
- English
- ISBN 10
- 8461622073
- ISBN 13
- 9788461622078
- Item weight
- 528 grams
MEMS Pressure Sensors: Fabrication and Process Optimization - describs the step by step fabrication process sequence along with flow chart for fabrication of micro pressure sensors taking into account various aspects of fabrication and designing of the pressure sensors as well as fabrication process optimization. A complete experimental detail before and after each step of fabrication of the sensor has also been discussed. This leads to the uniqueness of the book. MEMS Pressure Sensors: Fabrication and Process Optimization will greatly benefit undergraduate and postgraduate students of MEMS and NEMS courses. Process engineers and technologists in the microelectronics industry including MEMS-based sensors manufacturers.
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