Laser Heat-Mode Lithography : Principle and Methods

Language: English

Published by Springer, 2019

9811509425 / 9789811509421

Series: Book 204 of 233 - Springer Series in Materials Science

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Seller: AHA-BUCH GmbH, Einbeck, GermanyAHA-BUCH GmbH

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Druck auf Anfrage Neuware - Printed after ordering - This book provides a systematic description and analysis of laser heat-mode lithography, addressing the basic principles, lithography system, manipulation of feature size, grayscale lithography, resist thin films, and pattern transfer, while also presenting typical experimental results and applications. It introduces laser heat-mode lithography, where the resist thin films are essentially an opto-thermal response to the laser beam with changeable wavelength and are not sensitive to laser wavelength. Laser heat-mode lithography techniques greatly simplify production procedures because they require neither a particular light source nor a particular environment; further, there are no pre-baking and post-baking steps required for organic photoresists. The pattern feature size can be either larger or smaller than the laser spot by adjusting the writing strategy. The lithographic feature size can also be arbitrarily tuned from nanoscale to micrometer without changing the laser spot size.Lastly, the line edge roughness can be controlled at a very low value because the etching process is a process of breaking bonds among atoms. The book offers an invaluable reference guide for all advanced undergraduates, graduate students, researchers and engineers working in the fields of nanofabrication, lithography techniques and systems, phase change materials, etc.…

Seller Inventory # 9789811509421

Title
Laser Heat-Mode Lithography : Principle and Methods
Author
Jingsong Wei
Publisher
Springer
Publication year
2019
Condition
Neu
Binding
Buch
Language
English
ISBN 10
9811509425
ISBN 13
9789811509421
Item weight
454 grams
Dimensions
241x160x18 mm
Series
Book 204 of 233: Springer Series in Materials Science

AHA-BUCH GmbH

Einbeck, Germany

5-star seller

AbeBooks seller since August 14, 2006

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