LOW ENERGY ION BEAM AND PLASMA MODIFICATION OF MATERIALS

JAMES M. E. HARPER, IBM T J WATSON RESEARCH CENTER, NEW YORKKIYOSHI MIYAKE, HITACHI RESEARCH LABORATORY, HITACHI LTD., IBARAKI, JAPANJOHN R. MCNEIL, UNIVERSITY OF NEW MEXICOSTEVEN M. GORBATKIN, OAK RIDGE NATIONAL LABORATORY, OAK RIDGE, TENNESSEE DIV CLASS="CONTRIBUTORSPEOPLE">DIV CLASS="CONTRIBUTORSPEOPLEHIDDEN">W. Mà LLER, MAKOTO KITABATAKE, J. E. GREENE, M. V. R. MURTY, HARRY A. ATWATER, BERNARD A. PAILTHORPE, PETER KNIGHT, A. M. MAZZONE, J. MURI, CH. STEINBRüCHEL, A. NäRMANN, W. HEILAND, R.

ISBN 10: 1558991174 / ISBN 13: 9781558991170

Published by Cambridge University Press, 1991

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Bibliographic Details

• Title: LOW ENERGY ION BEAM AND PLASMA MODIFICATION OF MATERIALS
• Publisher: Cambridge University Press
• Publication Date: 1991
• Language: English
• ISBN 10: 1558991174
• ISBN 13: 9781558991170
• Binding: Hardcover
• Condition: Brand New

About this title

Synopsis

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.