Ion implantation techniques. Lectures given at the Ion Implantation School in connection with the 4. Internat. Conference on Ion Implantation: Equipement and Techniques Berchtesgaden Fed. Rep. of Germany September 13 - 15 1982.

ISBN 10: 3540118780 ISBN 13: 9783540118787
Published by Berlin, Springer, 1982
Language: English
Condition: Used - Very good Hardcover

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Used - Hardcover

Condition: Used - Very good

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