Introductory MEMS: Fabrication and Applications

Adams, Thomas M.; Layton, Richard A.

ISBN 10: 0387095101 / ISBN 13: 9780387095103

Published by Springer, 2009

About this Item

Fast Free Shipping â Good condition book with a firm cover and clean, readable pages. Shows normal use, including some light wear or limited notes highlighting, yet remains a dependable copy overall. Supplemental items like CDs or access codes may not be included.

Seller Inventory # GWV.0387095101.G

Bibliographic Details

• Title: Introductory MEMS: Fabrication and Applications
• Publisher: Springer
• Publication Date: 2009
• Language: English
• ISBN 10: 0387095101
• ISBN 13: 9780387095103
• Binding: Hardcover
• Condition: good

About this title

Synopsis

Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques. Part II focuses on MEMS transducers: principles of operation, modeling from first principles, and a detailed look at commercialized MEMS devices, in addition to microfluidics. Multiple field-tested laboratory exercises are included, designed to facilitate student learning about the fundamentals of microfabrication processes. References, suggested reading, review questions, and homework problems are provided at the close of each chapter.

Introductory MEMS: Fabrication and Applications is an excellent introduction to the subject, with a tested pedagogical structure and an accessible writing style suitable for students at an advanced undergraduate level across academic disciplines.