Introduction to Microlithography (Acs Professional Reference Book)

ISBN 10: 0841228485 ISBN 13: 9780841228481
Published by Amer Chemical Society, 1994
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Updated and expanded! Reviews the theory, materials, and processes that are used in the lithographic process. Opens with a brief historical introduction to the advances in microlithography. Discusses four major topics: the physics of the lithographic process, organic resist materials, resist processing, and plasma etching. Designed as a tutorial for researchers with no experience in the field, as well as those experienced in microlithography. Will also prove invaluable to those already involved in microlithography. Includes numerous references for more detailed reading on specific aspects of microlithography.

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Title: Introduction to Microlithography (Acs ...
Publisher: Amer Chemical Society
Publication Date: 1994
Binding: hardcover
Condition: As New

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Published by Amer Chemical Society, 1994
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Published by American Chemical Society, 1994
ISBN 10: 0841228485 ISBN 13: 9780841228481
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Thompson, Larry F.; Willson, C. Grant; Bowden, Murrae J.
ISBN 10: 0841228485 ISBN 13: 9780841228481
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Thompson, Larry F.; Willson, C. Grant; & Bowden, Murrae J. (eds)
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Published by Amer Chemical Society, 1994
ISBN 10: 0841228485 ISBN 13: 9780841228481
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Published by American Chemical Society, 1994
ISBN 10: 0841228485 ISBN 13: 9780841228481
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