Introduction to Microelectronic Fabrication: Volume V: 5 (Modular Series on Solid State Devices, Vol 5)

Jaeger, Richard C.

ISBN 10: 0201146959 / ISBN 13: 9780201146950

Published by Pearson, 1988

Dispatched, from the UK, within 48 hours of ordering. This book is in good condition but will show signs of previous ownership. Please expect some creasing to the spine and/or minor damage to the cover. Aged book. Tanned pages and age spots, however, this will not interfere with reading. Seller Inventory # CHL10476892

Synopsis:

Modular Series on Solid State Devices. This volume is a concise survey of the most up-to-date techniques in the field. It is devoted excusively to processing and its highlighted by careful explanations.

From the Back Cover:

Introduction to Microelectronic Fabrication, Second Edition, by Richard C. Jaeger, is a concise survey of the most up-to-date techniques in the field. It is devoted exclusively to processing and is highlighted by careful explanations, clean, simple language, and numerous fully solved example problems.

The second edition includes an entirely new chapter on MEMS, as well as substantial modifications to the chapters on MOS and bipolar process integration. Also included is new or expanded coverage of lithography and exposure systems, trench isolation, chemical mechanical polishing, shallow junctions, transient enhanced diffusion, copper Damascene processes and process simulation.

Bibliographic Details

Title: Introduction to Microelectronic Fabrication:...
Publisher: Pearson
Publication Date: 1988
Binding: paperback
Condition: Used; Good