An Introduction to Microelectromechanical Systems Engineering
Language: English
Published by Artech House Publishers, 1999
- Hardcover
- Used
Seller: World of Books Inc, Montgomery, IL, U.S.A.World of Books Inc
AbeBooks seller since March 23, 2026
Condition: Used - Good
£ 7.29
Quantity: 1 available
Add to basketItem description from seller
A non-technical introduction to the field of microelectromechanical systems (MEMS). It describes in detail the materials used in producing MEMS - including silicon, polymers and glass and quartz substrates - as well as MEMS design for nozzles, sensors, valves and other applications. It examines the manufacture of commercial MEMS using technologies such as oxidation, lithography, chemical vapour deposition and silicon fusion bonding and applications in a wide range of industries including data storage, telecommunications, consumer, automotive, medical and defence. The book also addresses the future of MEMS - its potential for microelectrode arrays, actuators and optical switches and other technologies.
Seller Inventory # CIN0890065810G
- Title
- An Introduction to Microelectromechanical Systems Engineering
- Author
- Nadim Maluf
- Publisher
- Artech House Publishers
- Publication year
- 1999
- Condition
- Good
- Binding
- Hardback
- Language
- English
- ISBN 10
- 0890065810
- ISBN 13
- 9780890065815
- Edition
- 2nd Edition
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About the Author
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World of Books Inc
Montgomery, IL, U.S.A.
AbeBooks seller since March 23, 2026
Shipping rates within U.S.A.
| Item | 4 to 12 business days | 3 to 6 business days |
|---|---|---|
| First item | £ 0.00 | £ 8.28 |
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