An Introduction to Microelectromechanical Systems Engineering

Language: English

Published by Artech House Publishers, US, 1999

0890065810 / 9780890065815

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A non-technical introduction to the field of microelectromechanical systems (MEMS). It describes in detail the materials used in producing MEMS - including silicon, polymers and glass and quartz substrates - as well as MEMS design for nozzles, sensors, valves and other applications. It examines the manufacture of commercial MEMS using technologies such as oxidation, lithography, chemical vapour deposition and silicon fusion bonding and applications in a wide range of industries including data storage, telecommunications, consumer, automotive, medical and defence. The book also addresses the future of MEMS - its potential for microelectrode arrays, actuators and optical switches and other technologies.

Seller Inventory # LU-9780890065815

Title
An Introduction to Microelectromechanical Systems Engineering
Author
Nadim Maluf
Publisher
Artech House Publishers, US
Publication year
1999
Condition
New
Binding
Hardback
Language
English
ISBN 10
0890065810
ISBN 13
9780890065815
Edition
2nd.
Item weight
600 grams
Dimensions
16.08 x 2.41 x 23.6 cm

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