An Introduction to Microelectromechanical Systems Engineering
Nadim Maluf
ISBN 10: 0890065810 ISBN 13: 9780890065815
Published by Artech House Publishers, 2000
Used
hardcover
From
HPB-Red, Dallas, TX, U.S.A.
Seller rating 5 out of 5 stars
AbeBooks Seller since 11 March 2019
This specific item is no longer available.
About this Item
Description:
Connecting readers with great books since 1972! Used textbooks may not include companion materials such as access codes, etc. May have some wear or writing/highlighting. We ship orders daily and Customer Service is our top priority! Seller Inventory # S_432129004
Synopsis:
A non-technical introduction to the field of microelectromechanical systems (MEMS). It describes in detail the materials used in producing MEMS - including silicon, polymers and glass and quartz substrates - as well as MEMS design for nozzles, sensors, valves and other applications. It examines the manufacture of commercial MEMS using technologies such as oxidation, lithography, chemical vapour deposition and silicon fusion bonding and applications in a wide range of industries including data storage, telecommunications, consumer, automotive, medical and defence. The book also addresses the future of MEMS - its potential for microelectrode arrays, actuators and optical switches and other technologies.
About the Author: Nadim Maluf is head of research and development at NovaSensor in Fremont, California, and is Consulting Professor of Electrical Engineering at Stanford University.
"About this title" may belong to another edition of this title.
Bibliographic Details
Title: An Introduction to Microelectromechanical ...
Publisher: Artech House Publishers
Publication Date: 2000
Binding: hardcover
Condition: Good
Edition: 2nd Edition