High speed and Highly Accurate Tip-Scanning Atomic Force Microscope | Design Methodology, Control Strategy, and Performance Evaluation for the Tip-scanning Atomic Force Microscope for the Industrial Large Samples
Dong-Yeon Lee
ISBN 10: 3639002709 ISBN 13: 9783639002706
Published by VDM Verlag Dr. Müller, 2013
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High speed and Highly Accurate Tip-Scanning Atomic Force Microscope | Design Methodology, Control Strategy, and Performance Evaluation for the Tip-scanning Atomic Force Microscope for the Industrial Large Samples | Dong-Yeon Lee | Taschenbuch | Englisch | VDM Verlag Dr. Müller | EAN 9783639002706 | Verantwortliche Person für die EU: preigu GmbH & Co. KG, Lengericher Landstr. 19, 49078 Osnabrück, mail[at]preigu[dot]de | Anbieter: preigu. Seller Inventory # 101824793
Synopsis:
A novel high speed and highly accurate tip scanning AFM (TS-AFM) head which uses a flexure guided xy and z scanning system has been developed. Moreover, additional components including a coarse z-stage, an optical microscope with a motorized focus stage and structural frames are also developed to evaluate the feasibility for application for large samples for example, Liquid Crystal Displays and wafers. As experiments, performances of AFM components are evaluated in view point of the travel range, the resolution, the resonance and so on. Especially, crosstalk effects among axes of fine scanners are investigated thoroughly. The vertical out-of-plane motion of the xy-scanner is less than 1 nm. Performances of AFM images are investigated via various standard samples. Here, crosstalk effects among axes of fine scanners are investigated via NC-AFM images. Also, high speed AFM images up to 5 Hz are realized for the 2D standard grating and compared with the commercial AFM. The TS-AFM is sufficiently accurate for measuring the small feature sample and expected to be widely used in the nano-resolution industrial measurement applications especially for large LCDs and wafer samples.
About the Author: After finishing the Ph. D. degree at KAIST(Korea Advanced Institute of Science and Technology), he is working at KERI(Korea Electrotechnology Research Institute). His research fields are the scanning probe microscopy and the nano-lithography system. Specially, he is very interested in the nano-design.
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Bibliographic Details
Title: High speed and Highly Accurate Tip-Scanning ...
Publisher: VDM Verlag Dr. Müller
Publication Date: 2013
Binding: Taschenbuch
Condition: Neu