Handbook of VLSI Microlithography: Principles, Technology and Applications (Materials Science and Process Technology)
Language: English
Published by William Andrew, 2010
- Hardcover
- Used
Seller: BoundlessBookstore, Wallingford, United KingdomBoundlessBookstore
AbeBooks seller since February 12, 2013
Condition: Used - Good
£ 16.00
Quantity: 1 available
Add to basketItem description from seller
Little wear to boards. Content is clean with some spotting.Good DJ with little wear.
Seller Inventory # 9999-999107883422
- Title
- Handbook of VLSI Microlithography: Principles, Technology and Applications (Materials Science and Process Technology)
- Author
- Various
- Publisher
- William Andrew
- Publication year
- 2010
- Condition
- Good
- Dust jacket
- Dust Jacket Included
- Binding
- Hardcover
- Language
- English
- ISBN 10
- 0815512813
- ISBN 13
- 9780815512813
The book leads off with a comparison of various lithography methods, covering the three major patterning parameters of line/space, resolution, line edge and pattern feature dimension control. The book's explanation of resist and resist process equipment technology may well be the first practical description of the relationship between the resist process and equipment parameters. The basics of resist technology are completely covered -- including an entire chapter on resist process defectivity and the potential yield limiting effect on device production.
Each alternative lithographic technique and testing method is considered and evaluated: basic metrology including optical, scanning-electron-microscope (SEM) techniques and electrical test devices, along with explanations of actual printing tools and their design, construction and performance. The editor devotes an entire chapter to today's sophisticated, complex electron-beam printers, and to the emerging x-ray printing technology now used in high-density CMOS devices. Energetic ion particle printing is a controllable, steerable technology that does not rely on resist, and occupies a final section of the handbook.
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BoundlessBookstore
Wallingford, United Kingdom
AbeBooks seller since February 12, 2013
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