Handbook of Semiconductor Interconnection Technology
Language: English
Published by CRC Press Feb 2006, 2006
- Hardcover
- New
Seller: AHA-BUCH GmbH, Einbeck, GermanyAHA-BUCH GmbH
AbeBooks seller since August 14, 2006
Condition: New
£ 363.71
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Add to basketItem description from seller
Neuware - First introduced about a decade ago, the first edition of the Handbook of Semiconductor Interconnection Technology became widely popular for its thorough, integrated treatment of interconnect technologies and its forward-looking perspective. The field has grown tremendously in the interim and many of the 'likely directions' outlined in the first edition are now standard in modern facilities. Reflecting those advances, this edition delves into the practical aspects of interconnections for manufacturing. It examines the interconnect and fabrication technologies now available, with an examination of future prospects for the field.What's in this Edition:- Detailed discussion of electrochemical equipment for plating copper - Information on tools used for evaporation, chemical vapor deposition, and plasma processes - Emphasis on measurement of mechanical and thermal properties of insulators - Methods for characterizing porous dielectric thin films - Greater focus on integration issues and properties of titanium, cobalt, and nickel silicides - Process schemes based on the increased need for borderless contact gates and source/drain - Expanded discussion on choices for low-dielectric insulators - Concentration on electroplated copper, especially morphology of plated films and their properties - Developments in thin film liners and barriers - Expanded material on copper reliability.…
Seller Inventory # 9781574446746
- Title
- Handbook of Semiconductor Interconnection Technology
- Author
- Geraldine Cogin Shwartz
- Publisher
- CRC Press Feb 2006
- Publication year
- 2006
- Condition
- Neu
- Binding
- Buch
- Language
- English
- ISBN 10
- 1574446746
- ISBN 13
- 9781574446746
- Edition
- 2nd Edition
- Item weight
- 1,093 grams
- Dimensions
- 267x187x30 mm
First introduced about a decade ago, the first edition of the Handbook of Semiconductor Interconnection Technology became widely popular for its thorough, integrated treatment of interconnect technologies and its forward-looking perspective. The field has grown tremendously in the interim and many of the "likely directions" outlined in the first edition are now standard in modern facilities. Reflecting those advances, this edition delves into the practical aspects of interconnections for manufacturing. It examines the interconnect and fabrication technologies now available, with an examination of future prospects for the field.
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