Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography (SPIE Press Monograph Vol. PM39)

Harry J. Levinson; Mark A. McCord; Franco Cerrina; Robert D. Allen; John G. Skinner; Andrew R. Neureuther; Martin C. Peckerar; F. Keith Perkins; Michael J. Rooks

ISBN 10: 0819423785 ISBN 13: 9780819423788
Published by Society of Photo-Optical Instrumentation Engineers, 1997
Language: English
Condition: Used - As new Hardcover

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