Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography (SPIE Press Monograph Vol. PM39)
Michael J. Rooks,F. Keith Perkins,Martin C. Peckerar,Andrew R. Neureuther,John G. Skinner,Robert D. Allen,Franco Cerrina,Mark A. McCord,Harry J. Levinson
ISBN 10: 0819423785 ISBN 13: 9780819423788
Published by Society of Photo-Optical Instrum, 1997
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Synopsis:
The dynamic field of lithography demands an authoritative handbook for process development and production and to aid in the training of scientists and engineers. It contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a textbook.
Synopsis: This first of two volumes covers microlithography, focusing on applications of microlithography techniques in microelectronics manufacturing. Coverage includes optical lithography, electron beam lithography, deep-UV resist technology, X-ray lithography, photomask fabrication procedures and limitations, metrology methods in photolithography, optical
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Bibliographic Details
Title: Handbook of Microlithography, Micromachining...
Publisher: Society of Photo-Optical Instrum
Publication Date: 1997
Binding: Hardcover
Condition: Good