Title: Handbook of Microlithography, Micromachining and Microfabrication, Volume 1 (Materials and Devices Series, 1)
Publisher: Institution Of Engineering And Technology
Publication Date: 1997
Language: English
ISBN 10: 0852969066
ISBN 13: 9780852969069
Binding: Hardcover
Condition: Like New
Book Type: book

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Focusing on the use of microlithography techniques in microelectronics manufacturing, this volume is one of a series addressing a rapidly growing field affecting the integrated circuit industry. New applications in such areas as sensors, actuators and biomedical devices, are described.

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