Handbook of Ion Beam Processing Technology: Principles, Deposition, Film Modification and Synthesis
Cuomo, Jerome J.; Rossnagel, Stephen M.; Kaufman, Harold R.
ISBN 10: 081551199X ISBN 13: 9780815511991
Published by Noyes Publications, 1990
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Hardcover
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About this Item
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Synopsis:
Deals with ion beam processing for basic sputter etching of samples, sputter deposition of thin films, the synthesis of material in thin film form, and the modification of the properties of thin films.
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Bibliographic Details
Title: Handbook of Ion Beam Processing Technology: ...
Publisher: Noyes Publications
Publication Date: 1990
Binding: Hardcover
Condition: good